发明名称 POLYMER ON GRAPHENE
摘要 A top-gated graphene field effect transistor can be fabricated by forming a layer of graphene on a substrate, and applying an electrochemical deposition process to deposit a layer of dielectric polymer on the graphene layer. An electric potential between the graphene layer and a reference electrode is cycled between a lower potential and a higher potential. A top gate is formed above the polymer.
申请公布号 US2015170906(A1) 申请公布日期 2015.06.18
申请号 US201414554000 申请日期 2014.11.25
申请人 NUtech Ventures 发明人 Redepenning Jody G.;Sinitskii Alexander;Wymore Benjamin
分类号 H01L21/02;H01L29/786;H01L29/51;H01L29/24;H01L29/66;H01L29/16 主分类号 H01L21/02
代理机构 代理人
主权项 1. A method of fabricating a graphene transistor, the method comprising: forming a layer of graphene on a substrate; applying an electrochemical deposition process to deposit a layer of dielectric polymer on the graphene layer; and forming a top gate above the polymer.
地址 Lincoln NE US