发明名称 PLASMA CELL WITH FLOATING FLANGE
摘要 A plasma cell for forming light-sustained plasma includes a transmission element configured to contain a volume of gas, a first terminal flange disposed at or near an opening of the transmission element, a second terminal flange disposed at or near another opening of the transmission element, a floating flange disposed between the first or second terminal flange and the transmission element. The floating flange is movable to compensate for thermal expansion of the transmission element. Further, the floating flange is configured to enclose the internal volume of the transmission element to contain a volume of gas within the transmission element. The transmission element is configured to receive illumination from an illumination source in order to generate plasma within the volume of gas. The transmission element is transparent to a portion of the illumination from the illumination source and a portion of broadband radiation emitted by the plasma.
申请公布号 WO2015089424(A1) 申请公布日期 2015.06.18
申请号 WO2014US70063 申请日期 2014.12.12
申请人 KLA-TENCOR CORPORATION 发明人 BEZEL, ILYA;SHCHEMELININ, ANATOLY;TORKAMAN, AMIR
分类号 H05H1/24;H05H1/48 主分类号 H05H1/24
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