THERMAL EVAPORATION SOURCES FOR WIDE-AREA DEPOSITION

摘要

A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.

主权项

1. A thermal evaporation source comprising:
a manifold body; a crucible configured to contain a volume of evaporant and including a circular in cross-section, a bottom, a top rim, and a side wall extension that extends above the top rim to a ceiling of the manifold body to form an annulus with inside walls of the manifold body and to form at least three restriction orifices; and an expansion chamber that is flowably connected to vapor space above the evaporant via the at least three restriction orifices.