ELECTROSTATIC RELAY

摘要

In an electrostatic relay in which a moving contact and a movable electrode are displaced in parallel with a base substrate, an opening force is increased when the movable electrode is separated from a fixed electrode, and a structure is simplified to enhance a degree of freedom of design. A fixed contact portion and a fixed electrode portion are fixed to the base substrate. The fixed electrode portion and a movable electrode portion constitute an electrostatic actuator that displaces the movable electrode portion and a moving contact portion. A movable spring provided in a spring supporting portion retains the movable electrode portion in a displaceable manner. A cantilever secondary spring is provided in the spring supporting portion, and a projection portion is provided in a front end face of the movable electrode portion. The secondary spring abuts on the projection portion while being not deformed until abutting on the projection portion, before the moving contact of the moving contact portion abuts on the fixed contact of the fixed contact portion when the moving contact portion and the movable electrode portion are displaced.

主权项

1. An electrostatic relay comprising:
a base substrate; a fixed contact portion that is fixed to the base substrate, the fixed contact portion including a fixed contact; a moving contact portion that includes a moving contact to be brought into contact with or separated from the fixed contact; a fixed electrode portion that is fixed to the base substrate; a movable electrode portion that is displaced along with the moving contact portion toward a direction parallel to the base substrate by an electrostatic force generated between the fixed electrode portion and the movable electrode portion; a first spring member that returns the displaced movable electrode portion to an original position; and a second spring member that abuts on one of a fixed portion fixed to the base substrate and the movable electrode portion or a movable portion displaced along with the movable electrode portion while being not deformed until abutting on one of the fixed portion and the movable electrode portion or the movable portion before the moving contact portion abuts on the fixed contact when the moving contact portion and the movable electrode portion are displaced, the second spring member being provided in the other of the fixed portion and the movable portion.