| 发明名称 |
METHOD OF PRODUCING ELECTROMECHANICAL TRANSDUCER ELEMENT, ELECTROMECHANICAL TRANSDUCER ELEMENT, LIQUID DROPLET DISCHARGE HEAD, AND IMAGE FORMING APPARATUS |
| 摘要 |
A method of producing an electromechanical transducer element includes forming a first, common electrode on one of a substrate and an undercoat layer; forming an electromechanical transducer film on the first electrode; forming a second electrode on the electromechanical transducer film; forming a first protective film on an upper surface of the second electrode, the electromechanical transducer film, and a side wall of the second electrode, and selectively forming a second protective film on a portion of the first protective film protecting the electromechanical transducer film and the side wall of the second electrode. |
| 申请公布号 |
US2015171307(A1) |
申请公布日期 |
2015.06.18 |
| 申请号 |
US201414572930 |
申请日期 |
2014.12.17 |
| 申请人 |
MASUDA Toshiaki;Miwa Keishi;Hayashi Keisuke;Kuroda Takahiko |
发明人 |
MASUDA Toshiaki;Miwa Keishi;Hayashi Keisuke;Kuroda Takahiko |
| 分类号 |
H01L41/053;H01L41/23;H01L41/29;B41J2/14;H01L41/047 |
主分类号 |
H01L41/053 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of producing an electromechanical transducer element comprising:
forming a first, common electrode on one of a substrate and an undercoat layer; forming an electromechanical transducer film on the first electrode; forming a second electrode on the electromechanical transducer film; forming a first protective film on an upper surface of the second electrode, the electromechanical transducer film, and a side wall of the second electrode, and selectively forming a second protective film on a portion of the first protective film protecting the electromechanical transducer film and the side wall of the second electrode. |
| 地址 |
Kanagawa JP |
