| 发明名称 |
PHYSICAL QUANTITY SENSOR, PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT |
| 摘要 |
A physical quantity sensor includes a semiconductor substrate, a diaphragm section that is disposed on the semiconductor substrate and is flexurally deformed when receiving pressure, a sensor element that is disposed on the diaphragm section, an element-periphery structure member that is disposed on one surface side of the semiconductor substrate and forms a cavity section together with the diaphragm section, and a semiconductor circuit that is provided on the same surface side as the element-periphery structure member of the semiconductor substrate. |
| 申请公布号 |
US2015168242(A1) |
申请公布日期 |
2015.06.18 |
| 申请号 |
US201414573537 |
申请日期 |
2014.12.17 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
MATSUZAWA Yusuke |
| 分类号 |
G01L7/08;G01C5/00 |
主分类号 |
G01L7/08 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A physical quantity sensor comprising:
a semiconductor substrate; a diaphragm section that is disposed above the semiconductor substrate and is flexurally deformed when receiving pressure; a sensor element that is disposed on the diaphragm section; a wall section that is disposed above one surface side of the semiconductor substrate and configures a cavity together with the diaphragm section; and a circuit section that is provided above the same surface side as the wall section of the semiconductor substrate. |
| 地址 |
Tokyo JP |
