| 摘要 |
An overhead traveling vehicle includes a hoist and a first sensor that monitors obstacles below, and a local carriage includes a hoist and travels along the track. A buffer is suspended from the track by vertical supports that extend vertically downward, and no members of the buffer are provided directly over load ports. A second sensor, which monitors an obstacle in a vicinity of the load ports and in a passageway-side area on a side opposite to a processing device, is provided on the track and transmits an obstacle detection signal to the overhead traveling vehicle and the local carriage. Upon receiving the obstacle detection signal from the second sensor, the overhead traveling vehicle and the local carriage stop the hoists, and the overhead traveling vehicle does not monitor obstacles in the passageway-side area using the first sensor. |
