| 发明名称 |
QCM SENSOR AND METHOD OF MANUFACTURING THE SAME |
| 摘要 |
In a QCM sensor and a method of manufacturing the same, the QCM sensor includes: a quartz plate; and an electrode provided on one and the other principal surfaces of the quartz plate, in which the electrode is provided with a pattern having a contour line in a planar view of the electrode. |
| 申请公布号 |
US2015168351(A1) |
申请公布日期 |
2015.06.18 |
| 申请号 |
US201514612549 |
申请日期 |
2015.02.03 |
| 申请人 |
FUJITSU LIMITED |
发明人 |
USHIGOME Michio |
| 分类号 |
G01N29/036;G01N29/22 |
主分类号 |
G01N29/036 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A QCM sensor comprising:
a quartz plate; and an electrode provided on each of one and another principal surfaces of the quartz plate, wherein the electrode is provided with a pattern having a contour line in a planar view of the electrode. |
| 地址 |
Kawasaki-shi JP |
