EVALUATION METHOD FOR CALIBRATION OF PROCESSING EQUIPMENT

摘要

The present invention provides an evaluation method for calibration of a processing equipment. According to the present invention, prior to processing a device, a test member including the same thickness and material with the device is manufactured. Then, the processing equipment is used to process the device, the test member and form a micro-processing structure in the test member. Next, the status of the micro-processing structure in the test member is inspected for evaluating if the processing equipment should be calibrated. In this way, the size and shape accuracy of the formation micro-processing structures using the monitored processing equipment can be reasonably guaranteed.

主权项

1. An evaluation method for calibration of a processing equipment, comprising the steps of:
providing a test member, having a plurality of test slices; providing a processing equipment, processing said test member and forming a micro-processing structure in said test member; separating said plurality of test slices, selecting a test slice as an inspection target for inspecting the status of said micro-processing structure in said inspection target, and producing an inspection result; and evaluating if said processing equipment should be calibrated regarding said inspection result.