主权项 |
1. A method of laser processing comprising:
focusing a pulsed laser beam into a laser beam focal line; directing the laser beam focal line into a material at a first angle of incidence to the material, the laser beam focal line generating an induced absorption within the material, the induced absorption producing a defect line along the laser beam focal line within the material; translating the material and the laser beam relative to each other, thereby forming a plurality of defect lines along a first plane at the first angle within the material; directing the laser beam focal line into the material at a second angle of incidence to the material, the laser beam focal line generating an induced absorption within the material, the induced absorption producing a defect line along the laser beam focal line within the material; and translating the material or the laser beam relative to one another, thereby forming a plurality of defect lines along a second plane at the second angle within the material, the second plane intersecting the first plane. |