发明名称 MASK AND METHOD FOR MANUFACTURING SAME
摘要 The present invention is a mask wherein multiple slender apertures are formed on a substrate, said mask being equipped with: multiple reinforcing parts, which are formed on one surface of the substrate in the shape of bridges intersecting the apertures in the lengthwise direction of the apertures, and which are thinner than the substrate; and excavated parts, which are formed by providing a step along the lengthwise direction in the aperture periphery regions, which are located at the side of the reinforcing parts. Thus, the mechanical strength of the mask can be improved without increasing the thickness of the mask, and the thickness can be maintained in accordance with that strength.
申请公布号 WO2015087936(A1) 申请公布日期 2015.06.18
申请号 WO2014JP82756 申请日期 2014.12.10
申请人 V TECHNOLOGY CO., LTD. 发明人 MIZUMURA, MICHINOBU
分类号 C23C14/04 主分类号 C23C14/04
代理机构 代理人
主权项
地址