MASS SPECTROMETRY METHOD

摘要

For the purpose of cleaning the inside of a chamber having a mass separator of a mass spectrometer quickly without opening the inside of the chamber to the atmosphere, a large amount of cleaning gas capable of separating a contaminant adhered to the internal walls of the mass spectrometer is introduced into the chamber via a pulse valve so that the maximum chamber pressure value in a cleaning step is higher than the maximum chamber pressure value in a sample measurement step.