发明名称 TERAHERTZ ELLIPSOMETER SYSTEM, AND METHOD OF USE
摘要 <p>A terahertz ellipsometer, the basic preferred embodiment being a sequential system having a backward wave oscillator (BWO); a first rotatable polarizer that includes a wire grid (WGP1); a rotating polarizer that includes a wire grid (RWGP); a stage (STG) for supporting a sample (S); a rotating retarder (RRET) comprising first (RP), second (RM1), third (RM2) and fourth (RM3) elements; a second rotatable polarizer that includes a wire grid (WGP2); and a Golay cell detector (DET).</p>
申请公布号 EP2798322(A4) 申请公布日期 2015.06.17
申请号 EP20120861672 申请日期 2012.04.06
申请人 J.A. WOOLLAM CO., INC. 发明人 HERZINGER, CRAIG, M.
分类号 G01J4/00;G01N21/21;G01N21/3581 主分类号 G01J4/00
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