| 摘要 |
We describe a nanopositioning device comprising: a mount and a moving stage held within said mount, preferably by sets of flexures on opposite sides of the stage such that the stage is displaceable in a longitudinal direction within said mount. A piezoelectric actuator is mechanically coupled to said stage to controllably displace the stage in a longitudinal direction. In embodiments the flexures comprise metal leaves having a plane extending between the stage and the mount perpendicular to said longitudinal direction. The device includes various additional features to improve resolution, frequency response and the like. |
