发明名称 Test head positioning system and method
摘要 <p>An apparatus for supporting a device (20), comprising:a base assembly (50); a support assembly (100) configured to support said device; and at least one compliant motion unit (70) positioned between said base assembly and said support assembly, said at least one compliant motion unit providing a range of motion in three horizontal degrees of freedom.</p>
申请公布号 EP2506021(B1) 申请公布日期 2015.06.17
申请号 EP20120172869 申请日期 2007.12.26
申请人 INTEST CORPORATION 发明人 NAPPEN, CHARLES, P.;WEST, CHRISTOPHER L.;CROWELL, STEVEN, J.
分类号 G05D16/20;B66F7/16;G01R31/28 主分类号 G05D16/20
代理机构 代理人
主权项
地址