发明名称 |
Test head positioning system and method |
摘要 |
<p>An apparatus for supporting a device (20), comprising:a base assembly (50); a support assembly (100) configured to support said device; and at least one compliant motion unit (70) positioned between said base assembly and said support assembly, said at least one compliant motion unit providing a range of motion in three horizontal degrees of freedom.</p> |
申请公布号 |
EP2506021(B1) |
申请公布日期 |
2015.06.17 |
申请号 |
EP20120172869 |
申请日期 |
2007.12.26 |
申请人 |
INTEST CORPORATION |
发明人 |
NAPPEN, CHARLES, P.;WEST, CHRISTOPHER L.;CROWELL, STEVEN, J. |
分类号 |
G05D16/20;B66F7/16;G01R31/28 |
主分类号 |
G05D16/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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