Embedded optical sensors using transverse Fabry-Perot resonators as detectors

摘要

A detector to detect light of a wavelength range and an incidence angle range, the detector including a substrate (106), a plurality of dielectric structures (104) on the substrate, each one of the plurality of dielectric structures (104) being to receive light through a side of the dielectric structure opposite the substrate, and a plurality of conductive structures (102) on the substrate, consecutive conductive structures (102) of the plurality of conductive structures having a corresponding dielectric structure of the plurality of dielectric structures therebetween, wherein each of the consecutive conductive structures and the corresponding dielectric structure forms a transverse Fabry-Perot resonator (100) by a cavity to induce an absorption resonance in response to the received light of the wavelength range.