| 摘要 |
带有机机能层基板包含基材、配置于基材上的有机机能层、配置于有机机能层上的保护膜。保护膜包含多个SiOxNy所表示的氮氧化矽层，各氮氧化矽层的折射率差的绝对值是0.1以内，x、y满足0.5≦x≦1.0、且-2.2y+2.1≦x≦-2.2y+2.41，在保护膜中，多个氮氧化矽层中，离有机机能层较远侧的氮氧化矽层的x的值比形成在最接近有机机能层的位置的氮氧化矽层大0.05以上。 A substrate with organic function layer includes a substrate, an organic function layer disposed on the substrate, and a protection film disposed on the organic function layer. The protection film includes a plurality of silicon oxynitride layers represented by SiOxNy. An absolute value of difference of refractivity of each of the silicon oxynitride layers is within 0.1, and x and y satisfy 0.5 ≦ x ≦ 1.0 and -2.2y+2.1 ≦ x ≦ |
