SERS-sensor with nanostructured surface and methods of making and using

摘要

A surface enhanced Raman scattering (SERS) sensor includes a substrate with a nanostructured surface. The nanostructured surface has a quasi-periodic, anisotropic array of elongated ridge elements having a wave-ordered structure pattern, each ridge element having a wavelike cross-section and oriented substantially in a first direction. The sensor also includes a plurality of metal elements disposed, at least in part, on tops of the ridge elements.

主权项

1. A surface enhanced Raman scattering (SERS) sensor, comprising
a substrate with a nanostructured surface, the nanostructured surface comprising a quasi-periodic, anisotropic array of elongated ridge elements having a wave-ordered structure pattern, each ridge element having a wavelike cross-section and oriented substantially in a first direction, wherein formation of the quasi-periodic anisotropic array includes irradiating a surface of the substrate with a first oblique beam of nitrogen ions in a first plane of incidence of the nitrogen ions to form a primary nanomask, irradiating the surface of the primary nanomask with a second oblique beam of nitrogen ions in a second plane of incidence of the nitrogen ions, the second plane being rotated around a normal of the substrate surface by an azimuthal angle with respect to the first plane, to form a secondary nanomask, the secondary nanomask comprising the quasi-periodic, anisotropic array of elongated ridge elements having the wave-ordered structure pattern and the wave-like cross-section with wave crests that are substantially perpendicular to the second plane of incidence of the nitrogen ions; and a plurality of metal elements disposed, at least in part, on tops of the ridge elements.