Power device with integrated Schottky diode and method for making the same

摘要

The present invention discloses a power device with integrated power transistor and Schottky diode and a method for making the same. The power device comprises a power transistor having a drain region, a Schottky diode in the drain region of the power transistor, and a trench-barrier near the Schottky diode. The trench-barrier is provided to reduce a reverse leakage current of the Schottky diode and minimizes the possibility of introducing undesired parasitic bipolar junction transistor in the power device.

主权项

1. A power device, comprising: a semiconductor substrate; a power transistor formed in the semiconductor substrate, wherein the power transistor comprises a drain region, a source region, a gate region, and a drain metal coupled to the drain region; a trench-barrier formed in the drain region of the power transistor, wherein the trench-barrier comprises a first trench and a second trench separated by a portion of the drain region; and wherein the first and the second trenches are filled with a conductive material, and wherein the conductive material is separated from the drain region of the power transistor by a dielectric material, and wherein the drain metal contacts the conductive material of the first and the second trenches; and a Schottky diode formed between the first and the second trenches, wherein the Schottky diode has an anode comprising the drain metal and a cathode comprising a portion of the drain region of the power transistor, and wherein the trench-barrier is configured to block a reverse leakage current of the Schottky diode.