Ozone gas generation unit and ozone gas supply system

摘要

In the present invention, a gas pipe integrated block has a plurality of internal pipe paths. The plurality of internal pipe paths are connected to an ozone generator, control means, a raw gas supply port, an ozone gas output port, and cooling water inlet/outlet ports, to thereby form a unit in which a raw gas input pipe path and an ozone gas output pipe path are integrated. The raw gas input pipe path extends from the raw gas supply port through an automatic pressure controller to the ozone generator. The ozone gas output pipe path extends from the ozone generator through a gas filter, an ozone concentration meter, and a flow rate controller, to the ozone gas output port.

主权项

1. An ozone generation unit having a front surface and a back surface, comprising:
an ozone generator for generating an ozone gas, said ozone generator having an upper portion and a back portion, said back portion having a side surface; an ozone power source for controlling power to be supplied to said ozone generator; a controller comprising at least two of:
a flow-rate-detector/flow-rate-adjuster comprising a mass flow controller (MFC) for controlling a flow rate of a raw gas that is inputted to said ozone generator;a gas filter for processing ozone gas outputted from said ozone generator so as to remove an impurity and a foreign substance therefrom;a pressure-detector/pressure-adjuster comprising an automatic pressure controller (APC) for automatically controlling internal pressure in said ozone generator; andan ozone concentration detector comprising an ozone concentration meter for detecting an ozone concentration value of the ozone gas outputted from said ozone generator; a raw gas supply port for supplying the raw gas from outside to said ozone generator; an ozone gas output port for outputting, to the outside, ozone gas obtained from said ozone generator through at least part of said controller; cooling water inlet/outlet ports for supplying and discharging a cooling water obtained from the outside to said ozone generator; and a control panel having a front surface and a back surface, wherein: said control panel is arranged at said front surface of said ozone generation unit; said ozone power source is arranged on said back surface of said control panel; said ozone generator is arranged at the back of said ozone power source; said flow-rate-detector/flow-rate-adjustor is arranged between said raw gas supply port and said ozone generator; said raw gas supply port, said flow-rate-detector/flow-rate-adjustor, said gas filter, said pressure-detector/pressure adjuster, and said ozone concentration detector are arranged at said back portion and said upper portion, or at said side surface, of said ozone generator; said raw gas supply port, said ozone gas output port, and said cooling water inlet/outlet ports are arranged so as to be connectable to said back surface of said ozone generation unit; and said ozone generation unit is formed as an integrated structure in which said ozone generator, said ozone power source, said controller, said raw gas supply port, said ozone gas output port, and said cooling water inlet/outlet ports are assembled together.