COPPER FILM FORMING AGENT AND METHOD FOR FORMING COPPER FILM

摘要

The present invention is a copper film forming agent containing a copper complex composed of methyl formate and a five or six membered nitrogen containing heterocyclic compound having one to three nitrogen atoms wherein the nitrogen containing heterocyclic compound has one or two ring structures the total number of carbon atoms contained in the substituent group is one to five and elements other than carbon atoms in the compound are not bonded to hydrogen atoms.