| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor that enables easy detection of abnormality generated in any place all over a detection surface of the sensor during use of the sensor.SOLUTION: A pressure sensor 1 is configured such that a thin-walled part of a silicon substrate 2 is formed as a diaphragm 3, piezoresistive elements 5a to 5d are formed on an outer surface of the diaphragm, and a vacuum chamber 4 is formed on an inner side of the diaphragm. The diaphragm comprises an abnormality detection part 7, 8, 9 formed of a thin continuous conductive wire. Therefore the pressure sensor exhibits excellent effects of enabling easy and constant detection of even such abnormality that a crack is caused in a part other than a bridge circuit part of the diaphragm and thus a small variation in voltage within an output range of the sensor is generated. |
