发明名称 |
FLOW RATE RANGE VARIABLE TYPE FLOW RATE CONTROL APPARATUS |
摘要 |
A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m (P1−P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area. |
申请公布号 |
US2015160662(A1) |
申请公布日期 |
2015.06.11 |
申请号 |
US201514626128 |
申请日期 |
2015.02.19 |
申请人 |
Fujikin Incorporated ;National University Corporation Tohoku University ;Tokyo Electron Ltd. |
发明人 |
Ohmi Tadahiro;Saito Masahito;Hino Shoichi;Shimazu Tsuyoshi;Miura Kazuyuki;Nishino Kouji;Nagase Masaaki;Sugita Katsuyuki;Hirata Kaoru;Dohi Ryousuke;Hirose Takashi;Shinohara Tsutomu;Ikeda Nobukazu;Imai Tomokazu;Yoshida Toshihide;Tanaka Hisashi |
分类号 |
G05D7/06;G05D23/19 |
主分类号 |
G05D7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Osaka JP |