PROCESSING LIQUID SUPPLYING APPARATUS, PROCESSING LIQUID SUPPLYING METHOD AND STORAGE MEDIUM

摘要

In one embodiment, a feed pump (6) of a tube pump type is used for supplying a processing liquid. The tube pump has a squeezing member (65) that moves from a first axial position of a tube (62) at which the squeezing member starts pinching of the tube, to a second axial position at which the squeezing member leaves the tube after feeding the processing liquid toward an ejecting part such as a nozzle (51). Only one pinched part pinched between the squeezing member and a guide member (61) is formed between the first axial position and the second axial position of the tube, and the only one pinched part moves along the axial direction of the tube, during feeding of a dose of the processing liquid toward the ejecting part.

主权项

1. A processing liquid supplying apparatus comprising a feed pump provided in a supply passage, wherein by means of the feed pump, said processing liquid supplying apparatus ejects a processing liquid supplied from a processing liquid source to a process object via an ejecting part, the feed pump including:
a resilient tube serving as a part of the supply passage; a guide member extending along an axial direction of the tube to support an outer surface of the tube; a squeezing member that moves along the axial direction of the tube with the tube being pinched between the squeezing member and the guide member, thereby to feed the processing liquid; and a moving mechanism that moves the squeezing member from a first axial position of the tube at which the squeezing member starts pinching of the tube, to a second axial position of the tube at which the squeezing member leaves the tube after feeding the processing liquid toward the ejecting part, wherein the squeezing member and the moving mechanism are configured such that only one pinched part pinched between the squeezing member and the guide member is formed between the first axial position and the second axial position of the tube, and said only one pinched part moves along the axial direction of the tube during discharging of a dose of the processing liquid toward the ejecting part.