| 摘要 |
PROBLEM TO BE SOLVED: To provide a catadioptric projection objective device for imaging an object field arranged on an object plane of a projection objective device onto an image field arranged on an image plane of the projection objective device.SOLUTION: A catadioptric projection objective device (100) has: a first objective device part (LG1) that has a first pupil surface (P1) configured so as to image a pattern from the object plane into a first intermediate image (IMI1); a second objective device part (HG) that is configured so as to image the first intermediate image (IMI1) into a second intermediate image (IMI2), and has a second pupil surface (P2) optically conjugate with the first pupil surface (P1); and a third objective device part (LG2, LG3 and LG4) that is configured so as to image the second intermediate image (IMI2) into the image plane (IS), and has a third pupil surface (P3) optically conjugate with the first and second pupil surfaces. |
