APPARATUS FOR INSPECTING LASER BEAM

摘要

The present invention relates to an apparatus for inspecting the status of a laser beam in a process of patterning a substrate by using the laser beam. The apparatus of the present invention comprises: a scanner; a moving unit; a multiplying lens; a detecting unit; and a control unit. The scanner controls the moving path of a laser beam and reflects an incident laser beam to a desired position. The moving unit moves the scanner from a processing area to an inspection area to inspect the status of the laser beam. The multiplying lens is placed on the moving path of the laser beam reflected from the scanner in the inspection area and multiplies the size of the cross section of the laser beam. The detecting unit is placed in the inspection area and made of a number of pixels. The detecting unit detects a laser beam multiplied in the detection area formed by some pixels from among the number of pixels. The control unit determines the position of the laser beam detected in the detection area, the distribution of a cross section energy, or the size.