| 摘要 |
PROBLEM TO BE SOLVED: To provide a cutting device which reduces the occurence of failures caused by scattered cutting water while inhibiting the degradation of a bellows structure. ! SOLUTION: A cutting device includes: intrusion prevention means (31) which prevents cutting water from intruding into the device and is formed by a bellows structure; and discharge means (33) which receives the cutting water flowing out from the intrusion prevention means and discharges the cutting water. The intrusion prevention means includes: a bellows part (311) which expands and contracts in conjunction with movement of a chuck table (3); and a support part (312) which supports the bellows part. A lower end of a side surface bellows part (311b) forming the bellows part is disposed separated from a lower surface of a case part (331), and the support part which is moved by expansion and contraction of the bellows part is guided on a guide part (334) formed in the case part. ! COPYRIGHT: (C)2015,JPO&INPIT |
