| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a temperature-independent array waveguide diffraction grating in which the secondary temperature dependency of the central transmission wavelength of an array waveguide diffraction grating is compensated. <P>SOLUTION: A material and a shape of a groove for filling the material in which the temperature dependency of refractive index is corrected to the secondary term are provided. The groove is formed on at least one of the array waveguide and a slab waveguide, and a material having a refractive index temperature coefficient different from the temperature coefficient of that of the waveguide is inserted or packed to the groove, thus the primary and secondary temperature dependencies of the central transmission wavelength of the array waveguide diffraction grating are compensated. The wavelength-temperature dependency of the array waveguide diffraction grating can be suppressed to 10 pm or smaller at the temperature range of -40°C to +80°C. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
