Substrate transfer apparatus

摘要

A substrate stopped at a first position is transferred toward a second position and is stopped at the second position in an accurate and stable manner. An intermediate position arrival time AT is measured while the substrate is being transferred from a substrate stop position toward a mounting work position, and a transfer status of the substrate (whether or not an unexpected factor has occurred) is assessed based on the intermediate position arrival time AT. Before the substrate reaches the second position, a deceleration pattern is controlled by altering a deceleration start timing T14 and the deceleration b in accordance with the intermediate position arrival time AT, thereby accurately stopping and positioning the substrate at the mounting work position. In this manner, under feed-forward control, the substrate can be stably transferred to the mounting work position.

主权项

1. A substrate transfer apparatus adapted to transfer a substrate stopped at a first position toward a second position and to stop the substrate at the second position, the substrate transfer apparatus comprising:
a substrate transfer mechanism that transfers a substrate along a substrate transfer path extending from the first position to the second position; a detection unit that detects the substrate at an intermediate position between the first position and the second position when the substrate is traveling along the substrate transfer path; and a control unit that controls the substrate transfer mechanism, such that, when one substrate is transferred from the first position toward the second position, a velocity of the one substrate is controlled after the one substrate arrived at the intermediate position in accordance with a detecting result by the detection unit, the control unit including: a time measurement section adapted to measure an intermediate position arrival time that is required for transferring the one substrate from the first position to the intermediate position where the one substrate is detected by the detection unit; and a velocity control section adapted to control a deceleration pattern in accordance with the intermediate position arrival time so that the one substrate detected by the detection unit is decelerated to stop at the second position.