NOZZLE AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING THE SAME

摘要

A nozzle includes a nozzle body, a conductive line, and a resistance measuring member. The nozzle body has nozzle holes. The conducive line is formed along the nozzle holes. The resistance measuring member measures the resistance change of the conducive line and detects the deformation of the nozzle holes. Therefore, the resistance measuring member detects the resistance change of the conductive member to accurately detect the deformation of the nozzle holes.