PHOTO-SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

摘要

A method of manufacturing photo-semiconductor device that has a photoconductive semiconductor film provided with electrodes and formed on a second substrate, the semiconductor film being formed by epitaxial growth on a first semiconductor substrate different from the second substrate, the second substrate being also provided with electrodes, the electrodes of the second substrate and the electrodes of the photoconductive semiconductor film being held in contact with each other.

主权项

1. A photoconductive device, comprising:
a substrate made of a first material; a photoconductive film made of a second material; and an antenna for radiating or coupling with a terahertz wave, said antenna being provided between said substrate and said photoconductive film, wherein said first material is different from said second material.