发明名称 BONDING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a bonding device which allows a highly efficient bonding operation without requiring increase in transport speed of a suction collet (head).SOLUTION: A bonding device which picks up chips from a chip supply member arranged at one supply member arrangement position by using a pair of suction collets and bond the chips to bonded members arranged at positions of a pair of bonded member arrangement positions, respectively, comprises: the pair of suction collets for picking up chips; transport means for making the second suction collet be in a state of being transported to the one bonded member arrangement position in a state where the first suction collet is transported to the supply member arrangement position, and making the first suction collet be in a state of being transported to the other bonded member arrangement position in a state where the second suction collet is transported to the supply member arrangement position; and lifting means for lifting up and down the suction collets.
申请公布号 JP2015103795(A) 申请公布日期 2015.06.04
申请号 JP20140015643 申请日期 2014.01.30
申请人 CANON MACHINERY INC 发明人 TAKASU SEIICHI
分类号 H01L21/52;H01L21/60;H05K13/04 主分类号 H01L21/52
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