PROCEDURE AND ARRANGEMENT FOR TESTING THE OPERATIONAL STATE OF A PROCESS TOOL

摘要

Methods and apparatus are disclosed for testing an operating state of a processing tool comprising an electrode with a transmitter having a sensor interface for connecting a sensor. A simulated sensor signal is output to the transmitter via the sensor interface, and the simulated sensor signal is converted into a measured value in the transmitter, where it is checked for correctness. The method does not require service personnel to be present on site, and after the sensor has been removed from the sensor interface, the simulated sensor signal is produced by an external electrode unit and is transmitted via the sensorless sensor interface to the transmitter.

主权项

1. A method of testing the operational state of a processing tool having an electrode including a sensor coupled to a transmitter through a sensor interface, the method comprising the steps of:
disconnecting the sensor from the sensor interface; generating a simulated sensor signal using an external electrode unit; receiving the simulated sensor signal at the sensor interface; transferring the simulated sensor signal to the transmitter; converting the simulated sensor signal to a measured value at the transmitter; and determining the correctness of the measured value.