| 发明名称 |
COLD TRAP |
| 摘要 |
In a cold trap provided between a vacuum chamber and a vacuum pump for the vacuum chamber, a cold panel is located in an exhaust passage from an exhaust port of the vacuum chamber to an intake port of the vacuum pump. A cold panel chamber includes an entrance that connects the exhaust passage to the exhaust port of the vacuum chamber, and an exit that connects the exhaust passage to the intake port of the vacuum pump. The exit is provided so as to be eccentric with respect to the entrance. |
| 申请公布号 |
US2015151216(A1) |
申请公布日期 |
2015.06.04 |
| 申请号 |
US201414556699 |
申请日期 |
2014.12.01 |
| 申请人 |
Sumitomo Heavy Industries, Ltd. |
发明人 |
Yatsu Takahiro |
| 分类号 |
B01D8/00 |
主分类号 |
B01D8/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A cold trap provided between a vacuum chamber and a vacuum pump for the vacuum chamber, comprising:
a cold panel located in an exhaust passage from an exhaust port of the vacuum chamber to an intake port of the vacuum pump; and a cold panel chamber comprising an entrance that connects the exhaust passage to the exhaust port of the vacuum chamber, and an exit that connects the exhaust passage to the intake port of the vacuum pump, wherein the exit is provided so as to be eccentric with respect to the entrance. |
| 地址 |
Tokyo JP |
