发明名称 LIGHT MEASUREMENT DEVICE AND LIGHT MEASUREMENT METHOD
摘要 PROBLEM TO BE SOLVED: To provide a light measurement device capable of detecting a surface position of a measuring object with high accuracy and acquiring molecular information on a surface of the measuring object.SOLUTION: A reflection type CARS microscope and a high resolution phase sensor are combined. A surface position is identified by the phase sensor, and reflected CARS light generated from the surface is detected to perform composition analysis.
申请公布号 JP2015102505(A) 申请公布日期 2015.06.04
申请号 JP20130245173 申请日期 2013.11.27
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 SHIOZAWA MANABU;WATANABE KOICHI;SHIRAI MASATAKA;OSAWA KENTARO
分类号 G01N21/65;G01B11/00 主分类号 G01N21/65
代理机构 代理人
主权项
地址