发明名称 |
LIGHT MEASUREMENT DEVICE AND LIGHT MEASUREMENT METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a light measurement device capable of detecting a surface position of a measuring object with high accuracy and acquiring molecular information on a surface of the measuring object.SOLUTION: A reflection type CARS microscope and a high resolution phase sensor are combined. A surface position is identified by the phase sensor, and reflected CARS light generated from the surface is detected to perform composition analysis. |
申请公布号 |
JP2015102505(A) |
申请公布日期 |
2015.06.04 |
申请号 |
JP20130245173 |
申请日期 |
2013.11.27 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
SHIOZAWA MANABU;WATANABE KOICHI;SHIRAI MASATAKA;OSAWA KENTARO |
分类号 |
G01N21/65;G01B11/00 |
主分类号 |
G01N21/65 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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