| 摘要 |
PROBLEM TO BE SOLVED: To provide components for a vacuum pump effectively connecting exhaust pipe passages, a Siegbahn type exhaust mechanism and a complex type vacuum pump effectively connecting exhaust pipe passages.SOLUTION: A vacuum pump according to an embodiment of this invention is a complex type vacuum pump comprising components for a vacuum pump effectively connecting exhaust pipe passages to each other and a Siegbahn type exhaust mechanism. A fixed circular disk has a spiral groove (a helical groove) having a crest part and a trough part formed therein and both or one of an inner diameter part oppositely facing against a rotary cylinder (a cylindrical part of a rotor) and an inner diameter part of the fixed circular disk disposed at the outer peripheral side has a protrusion (a projection) part. In addition, the rotary disk is formed with a spiral groove having a crest part and a trough part formed therein, and both or one of an outer diameter part of the rotary cylinder disposed at the inner peripheral side or an outer diameter part acting as a side oppositely facing against a spacer has a protrusion (a projection). |
