| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck which is hard to worsen in its absorption performance in a high-temperature process while keeping a structure having a base making an electrode and a dielectric film. ! SOLUTION: An electrostatic chuck comprises: a base 11 arranged by forming, on aluminum making an electrode or a base material 13 made of an aluminum alloy, a composite material film 14 of a composite material of ceramic and aluminum; and a ceramic dielectric film 12 formed on the base 11. In the composite material film 14, the content of the ceramic is 30-70 vol.%. ! COPYRIGHT: (C)2015,JPO&INPIT |
