| 发明名称 |
MASS SPECTROMETER AND MASS IMAGE ANALYZING SYSTEM |
| 摘要 |
To provide a mass spectrometer capable of performing high-sensitivity measurement using water molecules.;The mass spectrometer has a chamber in which a sample is disposed, an irradiation unit for emitting particles to the sample, and an extraction electrode which leads secondary ions emitted from the sample to a mass spectrometry unit, in which the irradiation unit switches a first mode of emitting primary ions for causing the secondary ions to be emitted from the sample and a second mode of emitting particles containing water molecules to be made to adhere to the sample and emits the particles to the sample. |
| 申请公布号 |
US2015155132(A1) |
申请公布日期 |
2015.06.04 |
| 申请号 |
US201314414072 |
申请日期 |
2013.06.24 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Aoki Naofumi;Kyogaku Masafumi;Iwasaki Kota;Murayama Yohei |
| 分类号 |
H01J37/26;H01J49/00 |
主分类号 |
H01J37/26 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A mass spectrometer which irradiates a sample with primary ions to perform mass spectrometry of secondary ions emitted from the sample,
the mass spectrometer comprising: a chamber in which the sample is disposed; an irradiation unit for irradiating sample with particles; and an extraction electrode which leads the secondary ions emitted from the sample to a mass spectrometry unit, the irradiation unit switching a first mode of irradiation of the primary ions for causing the secondary ions to be emitted from the sample and a second mode of emitting particles containing water molecules to be made to adhere to the sample, and irradiating the sample with the particles. |
| 地址 |
Tokyo JP |
