| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a new polishing material not dependent on only cerium. <P>SOLUTION: An oxide represented by following composition formula (1): A (Fe<SB POS="POST">1-y</SB>B<SB POS="POST">y</SB>)O<SB POS="POST">x</SB>is used as an polishing material (provided that, A indicates one or two or more selected from a group composed of Ca, Sr and Ba; B indicates one or two or more selected from among Al, Ti, V, Cr, Mn, Co, Ni, Cu, Zn, Ga and Zr; 2.5≤x≤3 and 0<y<1). <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
