Vapor deposition apparatus and process for continuous indirect deposition of a thin film layer on a substrate

摘要

An apparatus (100) and related process are provided for indirect vapor deposition of a sublimated source material as a thin film on a photovoltaic (PV) module substrate (14). A deposition head (110) is configured for sublimating a source material supplied thereto. The sublimated source material condenses onto a transport conveyor (160) disposed below the deposition head. A substrate conveyor (166) is disposed below the transport conveyor and conveys substrates in a conveyance path through the apparatus such that an upper surface of the substrates is opposite from and spaced below a lower leg (164) of the transport conveyor. A heat source (168) is configured adjacent the lower leg of the transport conveyor. The source material plated onto the transport conveyor is sublimated along the lower leg and condenses onto to the upper surface of substrates conveyed by the substrate conveyor.