发明名称 回転式シャッタを有する脱ガスチャンバのUVランプアセンブリ
摘要 <p>A UV lamp assembly having rotary shutters. Each rotary shutter has a concave wall with a reflective concave surface. The rotary shutters can be collectively rotated between an open position and an closed position. At the open position, the rotary shutters do not block UV light of UV lamps from leaving the UV lamp assembly while at the closed position the rotary shutters block UV light from leaving the UV lamp assembly.</p>
申请公布号 JP5726897(B2) 申请公布日期 2015.06.03
申请号 JP20120544472 申请日期 2010.12.06
申请人 发明人
分类号 H01L21/304;H01L21/3065 主分类号 H01L21/304
代理机构 代理人
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