发明名称 METHOD FOR FORMING OXIDE SEMICONDUCTOR
摘要 <p>The present invention provides a method for forming an oxide semiconductor. The method for forming an oxide semiconductor comprises: a step of mixing a compound including metal atoms and a solvent to manufacture a mixed solution; a step of immersing a substrate in the mixed solution; and a step of radiating ultrasonic waves to the mixed solution to form an oxide semiconductor on the substrate.</p>
申请公布号 KR20150060328(A) 申请公布日期 2015.06.03
申请号 KR20130144632 申请日期 2013.11.26
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 OH, HIM CHAN;HWANG, CHI SUN;YANG, JONG HEON;CHU, HYE YONG
分类号 H01L21/208;H01L21/31 主分类号 H01L21/208
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