| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a thick film, high orientation, and high critical current at a low cost, relating to thermal-treatment formation of a superconductive film by thermal decomposition of metal organic compound. <P>SOLUTION: In manufacturing a superconductive film material having thickness around 0.6μm to severalμm, a calcination film is interposed, which has a multilayer structure in which the calcination film having such composition as corresponds to at least one RE'123 is interposed between calcination films having such composition as correspond to a plurality of RE123. As a result, a superconductive film is manufactured which has a thick film, high orientation, and high critical current exceeding 200A per 1 cm width, containing many lamination defects. Further, by replacing a part of calcination step in an applied thermal decomposition method with the irradiation treatment under the light of ultraviolet excimer lamp having a specified wavelength and intensity, a high orientation and a high critical current are available with a film thickness that is larger than in the case where all steps are performed with thermal energy. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
