| 发明名称 |
THIN FILM BATTERY FABRICATION WITH MASK-LESS ELECTROLYTE DEPOSITION |
| 摘要 |
A method of fabricating a thin film battery may include a blanket deposition of an electrolyte layer followed by selective laser patterning of the electrolyte layer. Some or all of the other device layers may be in situ patterned layers—formed using shadow masks. |
| 申请公布号 |
EP2721689(A4) |
申请公布日期 |
2015.06.03 |
| 申请号 |
EP20120800105 |
申请日期 |
2012.06.07 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SONG, DAOYING;JIANG, CHONG;KWAK, BYUNG SUNG LEO |
| 分类号 |
H01M10/052;H01M4/04;H01M4/139;H01M4/70;H01M6/40;H01M10/04;H01M10/0562;H01M10/0585 |
主分类号 |
H01M10/052 |
| 代理机构 |
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代理人 |
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| 主权项 |
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