Substrate conveying container opening/closing device, lid opening/closing device and semiconductor manufacturing apparatus

摘要

A substrate conveying container opening/closing device includes an elevator carriage provided in a substrate transfer area and configured to be moved up and down by an elevator mechanism, a cover member for opening and closing an opening of a wall, a seal member for sealing a gap between the cover member and the periphery of the opening, a lid detaching/attaching mechanism provided in the cover member and configured to detach and attach the lid, a guide unit provided in the elevator carriage and configured to guide the cover member upward so that the cover member can advance from a retracting position toward the wall, a guideway provided in the wall to extend in a direction perpendicular to a seal surface of the opening, and a rotating body provided in the cover member and configured to roll downward along the guideway as the elevator carriage is moved downward.

主权项

1. A substrate conveying container opening/closing device for bringing a periphery of a lid openably closing a front surface of a substrate conveying container into contact with a periphery of a first opening formed at a first surface side of a wall, and for removing the lid through a second opening formed to be inclined upward with respect to a vertical plane and formed on a substrate transfer area which is at a second surface side of the wall, the device comprising:
an elevator carriage installed at the substrate transfer area, and configured to be moved up and down by an elevator mechanism; a cover member configured to open and close the second opening, to be supported by the elevator carriage, and to be provided with a peripheral edge portion making contact with a periphery of the second opening to close the second opening; a seal member configured to seal a gap between the cover member and the periphery of the second opening; a lid detaching/attaching mechanism installed at the cover member, and configured to detach and attach the lid of the substrate conveying container while the second opening is closed by the cover member; a guide unit installed at the elevator carriage, and configured to guide the cover member upward and to restrain a position of the cover member, in order for the cover member to advance from a retracting position toward the wall with respect to the elevator carriage; a guideway installed at the wall to extend in a direction perpendicular to a seal surface of the periphery of the second opening; and a rotating body installed at the cover member, and configured to be rotatable about a laterally-extending axis and parallel to an opening surface of the second opening, and configured to make contact with the guideway from above and to roll downward along the guideway as the elevator carriage is moved downward, wherein the cover member is configured to lie in a retracting position when the elevator carriage is in an upper position, configured to advance from the retracting position by a rolling movement of the rotating body and the guiding action of the guide unit as the elevator carriage is moved downward, and configured to close the second opening in a posture opposing the second opening.