Method of fabricating optical devices using laser treatment

摘要

A method for forming optical devices. The method includes providing a gallium nitride substrate member having a crystalline surface region and a backside region. The method also includes subjecting the backside region to a laser scribing process to form a plurality of scribe regions on the backside region and forming a metallization material overlying the backside region including the plurality of scribe regions. The method removes at least one optical device using at least one of the scribe regions.

主权项

1. An optical device comprising:
a gallium and nitrogen containing substrate member having a crystalline surface region and a backside opposite the crystalline surface region; a laser stripe region overlying a portion of the crystalline surface region; at least one laser scribe line on the backside and underlying at least a portion of the laser stripe region, the at least one laser scribe line comprising a recessed region extending partially through a thickness of the gallium and nitrogen containing substrate, wherein portions of the backside within a vicinity of the at least one laser scribe line have a higher conductivity than portions of the backside outside the vicinity of the at least one laser scribe line; and a metallization material contacting the backside and one or more portions of the at least one laser scribe line to form a metal contact.