Optical modulator module and semiconductor optical modulator

摘要

A semiconductor optical modulator includes optical input and output portions; a plurality of Mach-Zehnder modulators, each including first and second waveguide arms having first and second modulation electrodes, respectively; an optical demultiplexer coupled between the optical input portion and the Mach-Zehnder modulators through an optical waveguide; an optical multiplexer coupled between the optical output portion and the Mach-Zehnder modulators; a plurality of electrical inputs; and a plurality of differential transmission lines electrically connecting the electrical inputs to the Mach-Zehnder modulators. The first modulation electrode and the second modulation electrode of at least one of the Mach-Zehnder modulators, one of the electrical inputs, and one of the differential transmission lines that connects such one electrical input to such one Mach-Zehnder modulator form an electrical circuit having a differential impedance in a range of 80Ω to 95Ω.

主权项

1. A semiconductor optical modulator comprising:
an optical input portion; an optical output portion; a plurality of Mach-Zehnder modulators arrayed in a direction of a first axis, each of the Mach-Zehnder modulators including a first waveguide arm with a first modulation electrode and a second waveguide arm with a second modulation electrode; an optical waveguide having a mesa structure; an optical demultiplexer coupled between the optical input portion and the Mach-Zehnder modulators through the optical waveguide; an optical multiplexer coupled between the optical output portion and the Mach-Zehnder modulators; a plurality of electrical inputs; and a plurality of differential transmission lines electrically connecting the electrical inputs to the Mach-Zehnder modulators, wherein the Mach-Zehnder modulators, the optical demultiplexer, the optical multiplexer, the electrical inputs, and the differential transmission lines are disposed on a single substrate, and the first modulation electrode and the second modulation electrode of at least one Mach-Zehnder modulator, and one of the electrical inputs, and one of the differential transmission lines that connects the said one of the electrical inputs to the at least one Mach-Zehnder modulator form an electrical circuit having a differential impedance in a range of 80Ω 95Ω.