| 发明名称 | MEMS element and method of manufacturing the same | ||
| 摘要 | According to one embodiment, a MEMS element comprises a first electrode fixed on a substrate, and a second electrode arranged above the first electrode, facing the first electrode, and vertically movable. The second electrode includes a second opening portion that penetrates from an upper surface to a lower surface of the second electrode. The first electrode includes a first opening portion at a position corresponding to at least a part of the second opening portion, the first opening portion penetrating from an upper surface to a lower surface of the first electrode. | ||
| 申请公布号 | US9045330(B2) | 申请公布日期 | 2015.06.02 |
| 申请号 | US201313802520 | 申请日期 | 2013.03.13 |
| 申请人 | KABUSHIKI KAISHA TOSHIBA | 发明人 | Kato Yuriko;Yamazaki Hiroaki;Ogawa Etsuji;Masunaga Takayuki |
| 分类号 | H01L29/84;B81B3/00;H01G5/18 | 主分类号 | H01L29/84 |
| 代理机构 | Holtz, Holtz, Goodman & Chick PC | 代理人 | Holtz, Holtz, Goodman & Chick PC |
| 主权项 | 1. A MEMS element comprising: a first electrode fixed on a substrate; and a second electrode arranged above the first electrode, facing the first electrode, and vertically movable; wherein the second electrode includes a second opening portion that penetrates from an upper surface to a lower surface of the second electrode, and wherein the first electrode includes a first opening portion at a position corresponding to at least a part of the second opening portion, the first opening portion penetrating from an inner part of an upper surface to an inner part of a lower surface of the first electrode, and the first opening portion being entirely surrounded by the first electrode. | ||
| 地址 | Tokyo JP | ||