THE CRYSTAL GROWTH HEATING ELECTRODE CONSTRUCTION FOR COOLING WATER LINE

摘要

The present invention relates to a coolant pipe structure for cooling electrodes for a heater of monocrystal growth furnace and, more specifically, a coolant pipe structure for cooling electrodes for a heater of monocrystal growth furnace, whose coolant pipe structure in the electrodes used as the heater is improved to improve temperature distribution in a crucible of the monocrystal growth furnace and to improve temperature distribution in the pipe according to monocrystal processes because the coolant pipe is an important place in the process conditions of the monocrystal growth furnace. The structure improvement of the coolant pipe in the electrodes used for the heater of the monocrystal growth furnace is allowed to improve temperature distribution of electrodes and to maintain temperature distribution in the heater, thereby uniformly forming the temperature distribution of the heater which is required to grow monocrystal growth.