SCANNING PROBE MICROSCOPE, ALIGNING METHOD, RECORDING MEDIUM AND ALIGNING SYSTEM USING THE SAME

摘要

The present invention relates to a probe microscope to ease the arrangement of an optical beam by using a method of directly confirming the optical beam with an object lens by inserting a screen, which is a reflecting panel, between a cantilever and the object lens, a method to arrange an optical beam of the probe microscope by using the same, a recording medium, and a system to automatically arrange an optical beam of the probe microscope. To achieve the purpose, provided is a probe microscope, which includes a target position, set at an end of an upper surface of the cantilever and into which the optical beam comes in order to precisely measure at least one among movement displacement, movement frequency, and bending degrees; a magnifying unit magnifying and displaying the cantilever including the target position; an image display device displaying the cantilever, magnified by the magnifying unit, as an image; and a screen installed in a vertical upper part of the cantilever, and formed to make an incident position of the optical beam displayed by the image display part as an image. Thus, as a precise optical beam is precisely arranged on an upper surface of the cantilever, the precision of the probe microscope is improved and an error of an analysis result is minimized.